The Cleanroom Research Laboratory is a cross-disciplinary center. It is physically located at the “Natural Science & Engineering Research Laboratories” building, or NSERL. A university-wide advisory committee, composed of members from diverse fields, provides the associate director of the facility with information on the needs and desires associated with faculty research.The Cleanroom Research Laboratory at UT Dallas offers an excellent location for various technical organizations and companies to carryout research activities. The Laboratory includes facilities for device fabrication and characterization with a range of equipment, such as plasma etch, PECVD, LPCVD, Metallization (sputter, e-gun, thermal evap), wet chemical stations, thermal (oxidation/diffusion, RTP) Lithography, and surface analysis tools. An external user agreement must be completed and approved for access. Contact the Director for details.
Internal UTD Announcements
Cleanroom Laboratory Access
Fee Schedule – External Academic Users
Fee Schedule – External Industry Users
Tool Status
Online Tool Reservations
Sign-up Genius [for availible e-beam training sessions]
Work Request Forms
AJA Sputter Target Change Request
Mask Fabrication Request
Tystar Wafer Oxidation
Tystar LPCVD Deposition
About
Contact Information
Faculty & Staff
Cleanroom Floor Plan
Laboratory Environment
Particle Count Data
Temperature & Humidity
Effluent Water pH
Links to Useful and Informative Content
History of the Transistor: many users utilize the CRL facility to make these fascinating devices! See how their work fits into the broader context of this technology