The UTD Cleanroom Research Laboratory (CRL) provides safety for both the researchers and the specialized equipment. In order to prevent from seriously injuring researchers, users in the cleanroom must obey the safety rules and proceed with caution. In order to not contaminate the equipment being used, there are certain gowning procedures that must be followed.
The following list of Rules briefly summarizes the Current Operational practice of the Cleanroom Laboratory facility at UTD. All users must read, understand and obey these rules in order to maintain their access privileges to the CRL.
- Not bring any food or drink into any area of the CRL.
- Follow instructions from the CRL staff at all times.
- Users must follow the CRL Safety Manual and Operating Procedures.
- Users must work under a “buddy” system.
- Users must assist in and follow CRL housekeeping procedures.
- Users must apply and be certified for CRL access.
- Users must maintain a professional decorum at all times.
- Users must contact CRL staff for all chemical handling from storage bunkers.
- Users must contact CRL staff for waste disposal from storage vessels.
- Users must be trained and certified to run a process or operate a tool.
Material Safety Data Sheets (MSDS)
During our experience operating the UT Dallas Cleanroom Research Laboratories (CRL), we have encountered safety issues that needed correcting. The following list of documents describes safety issues and the corrective action taken to resolve the danger to our users, as well as general safety issues associated with cleanroom environments.
(these documents are coming soon)
- Rules for CEE Spin Coater
- CEE Spin Coater Local Hood
- NSERL Cleanroom Research Laboratory Evacuation Plan
- Safety Notice – Syringe Filter
- Blue – M Oven Exhaust Enclosure Airflow Balancing
- Service Warning – RIE Plasma Exhaust Line Condenses HF Acid
- Automatic LN2 Fill Station Instructions – Asphyxiation warning
- Solvent Hood Waste Collection Can Servicing
- Removing Chemical Fumes from Storage Refrigerator
- Back Dock Chemical Neutralization System
- Burn Box Incineration of Toxic Exhaust
- Bunker Storage of Chemicals and Toxic Gas Supplies
- Toxic Gas Monitor System
- Process Gas Bottle Cabinet and Gas Distribution System
- Tool Maintenance Handled by Experienced Staff
- Tool Data Security – Remote Secure Server