Jetfirst 200 Rapid Thermal Processor
JetFirst 200 Calibrations – December 2009 Calibrations
TR02/TR03 MPTC RTP – 600 Rapid Thermal Processor
The MPTC RTP-600 is a compact, single-wafer, desk-top rapid thermal process system that is capable of rapidly heating samples from ambient up to 1200 C. The object features an easily interchangeable quartz heating chamber with closed-loop temperature control and programmable Time-Temperature profiles. The reaction chamber is configured to hold 100 mm wafers. The UTD Cleanroom has two of these objects. One unit is plumbed with nitrogen and oxygen and the other with nitrogen and forming gas.
Minibrute Atmospheric Furnaces
The four-stack Thermco MiniBrute atmospheric furnace system provides basic oxidation and annealing capabilities needed for electron device fabrication on wafers up to 100 mm in diameter. The system is presently configured to allow either O2, 10% O2 + 90% N2, N2, or forming gas to be delivered to tubes 2 and 3. The two bottom tubes are restricted to silicon-only processing. The bottom tube, which is used only for silicon oxidation, can also be connected to a steam generator for wet oxidation processes. The top tubes are designated for general use.
Process Data
Process Data Tube 4: 10nm Oxide
Control Charts
Control Chart Tube 4: 10nm Oxide
MOSCAP Data
Tystar Diffusion/Oxidation Furnaces
The four-stack Tystar atmospheric furnace system provides basic oxidation and annealing capabilities needed for silicon transistor and MEMS fabrication on wafers up to 150 mm in diameter. The system is presently configured with two oxidation tubes and two tubes for solid-source diffusion and annealing of N and P type dopants. The furnaces are fully computer-controlled and feature automated load/unload stations and remote recipe editing and download.
Process Data
T5: General Oxidation 10nm Oxide Process Data
T6: Gate Oxidation 10nm Oxide Process Data
T7: P-Type Diffusion Process Data
T8: N-Type Diffusion Process Data
Control Charts
Tube 5: 10nm Oxide Control Chart
Tube 6: 10nm Oxide Control Chart
MOSCAP Data
Tube 5: 10nm Ox BV MOSCAP Data
Tube 5: 10nm Ox CV MOSCAP Data