Dr. Julia Wan-Ping Hsu has received $270,000 from the Semiconductor Research Corporation for her research on Carbon-free Sol-gel Precursors for Metal Oxide EUV Resist. Dr. Hsu will investigate the sensitivity for solubility switching in indium-based precursors and study their mechanisms through in-situ measurements of film chemistry and decomposition products
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Dr. Julia W. P. Hsu receives $270,000 from the SRC
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